Type: | Plane Sputtering Traget |
---|---|
Shape: | Round |
Certification: | ISO |
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Oxygen Content | Grain Size | Purity | The Max Length | Thickness |
<1000ppm | 5-500um | >3N | 4000mm | 5-12mm |
Length per pc | Roughness | Relative Density | Target Gap | Bonding Ratio |
2000mm | Ra<0.8um | >99% | 0.15-0.35mm | >99% |