| Type: | Plane Sputtering Traget |
|---|---|
| Shape: | Round |
| Certification: | ISO |
|
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| Oxygen Content | Grain Size | Purity | The Max Length | Thickness |
| <1000ppm | 5-500um | >3N | 4000mm | 5-12mm |
| Length per pc | Roughness | Relative Density | Target Gap | Bonding Ratio |
| 2000mm | Ra<0.8um | >99% | 0.15-0.35mm | >99% |
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